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ELECTRICAL, RUTHERFORD BACKSCATTERING AND TRANSMISSION ELECTRON MICROSCOPY STUDIES OF FURNACE ANNEALED ZINC IMPLANTED GAASKULAR SS; SEALY BJ; STEPHENS KG et al.1980; SOLID-STATE ELECTRON.; GBR; DA. 1980; VOL. 23; NO 8; PP. 831-838; BIBL. 16 REF.Article

Performance enhancement on sub-70nm strained silicon SOI MOSFETs on ultra-thin thermally mixed strained silicon/SiGe on insulator(TM-SGOI) substrate with raised S/DLEE, B. H; MOCUTA, A; LAVOIE, C et al.IEDm : international electron devices meeting. 2002, pp 946-948, isbn 0-7803-7462-2, 3 p.Conference Paper

Performance comparison and channel length scaling of strained si FETs on SiGe-on-Insulator (SGOI)CAI, J; RIM, K; KANARSKY, T et al.International Electron Devices Meeting. 2004, pp 165-168, isbn 0-7803-8684-1, 1Vol, 4 p.Conference Paper

Defects and electrical consequences in SOI buried oxidesHOVEL, H. J; ALMONTE, M; LEE, J. D et al.Proceedings - Electrochemical Society. 2003, pp 105-110, issn 0161-6374, isbn 1-56677-375-X, 6 p.Conference Paper

Mechanism for enhancement of electrical activation of silicon in GaAs by aluminum co-implantationDE SOUZA, J. P; SADANA, D. K.Applied physics letters. 1993, Vol 63, Num 23, pp 3200-3202, issn 0003-6951Article

Direct evidence of arsenic clustering in high dose arsenic-implanted siliconWU, N. R; SADANA, D. K; WASHBURN, J et al.Applied physics letters. 1984, Vol 44, Num 8, pp 782-784, issn 0003-6951Article

LASER ANNEALING OF CAPPED AND UNCAPPED GAASKULAR SS; SEALY BJ; BADAWI MH et al.1979; ELECTRON. LETTERS; GBR; DA. 1979; VOL. 15; NO 14; PP. 413-414; BIBL. 5 REF.Article

High resolution transmission electron microscopy study of Se+-implanted and annealed GaAs: mechanisms of amorphization and recrystallizationSADANA, D. K; SANDS, T; WASHBURN, J et al.Applied physics letters. 1984, Vol 44, Num 6, pp 623-625, issn 0003-6951Article

Shallow junction formation by preamorphization with tin implantationDELFINO, M; SADANA, D. K; MORGAN, A. E et al.Applied physics letters. 1986, Vol 49, Num 10, pp 575-577, issn 0003-6951Article

Reaction of titanium with silicon nitride under rapid thermal annealing = Réaction du titane avec le nitrure de silicium sous recuit rapideMORGAN, A. E; BROADBENT, E. K; SADANA, D. K et al.Applied physics letters. 1986, Vol 49, Num 19, pp 1236-1238, issn 0003-6951Article

Characterization of a self-aligned cobalt silicide processMORGAN, A. E; BROADBENT, E. K; DELFINO, M et al.Journal of the Electrochemical Society. 1987, Vol 134, Num 4, pp 925-935, issn 0013-4651Article

Annealing and oxidation behavior of low-pressure chemical vapor deposited tungsten slicide layers on polycrystalline silicon gatesSADANA, D. K; MORGAN, A. E; NORCOTT, M. H et al.Journal of applied physics. 1987, Vol 62, Num 7, pp 2830-2835, issn 0021-8979Article

Self-aligned silicided (PtSi and Cosi2) ultra-shallow p+/n junctionsBROADBENT, E. K; DELFINO, M; MORGAN, A. E et al.IEEE electron device letters. 1987, Vol 8, Num 7, pp 318-320, issn 0741-3106Article

Transmission electron microscopy of aluminum implanted and annealed (100) Si: direct evidence of aluminum precipitate formationSADANA, D. K; NORCOTT, M. H; WILSON, R. G et al.Applied physics letters. 1986, Vol 49, Num 18, pp 1169-1171, issn 0003-6951Article

Ion implantation of Si by 12C, 29Si, and 120Sn: amorphization and annealing effectsKOU-WEI WANG; SPITZER, W. G; HUBLER, G. K et al.Journal of applied physics. 1985, Vol 58, Num 12, pp 4553-4564, issn 0021-8979Article

Residual defects following rapid thermal annealing of shallow boron and boron fluoride implants into preamorphized siliconCARTER, C; MASZARA, W; SADANA, D. K et al.Applied physics letters. 1984, Vol 44, Num 4, pp 459-461, issn 0003-6951Article

Arsenic source and drain implant induced degradation of short-channel effects in NMOSFET'sACOVIC, A; SADANA, D. K; DAVARI, B et al.IEEE electron device letters. 1993, Vol 14, Num 7, pp 345-347, issn 0741-3106Article

Boron redistribution in arsenic-implanted silicon and short-channel effects in metal-oxide-semiconductor field effect transistorsSADANA, D. K; ACOVIC, A; DAVARI, B et al.Applied physics letters. 1992, Vol 61, Num 25, pp 3038-3040, issn 0003-6951Article

Range and shape factors, damage, regrowth, and redistribution for Ag implants in (100) and (111) SiWILSON, R. G; JAMBA, D. M; SADANA, D. K et al.Journal of applied physics. 1987, Vol 61, Num 4, pp 1355-1358, issn 0021-8979Article

Near-surface defects formed during rapid thermal annealing of preamorphized and BF2+-implanted siliconSANDS, T; WASHBURN, J; GRONSKY, R et al.Applied physics letters. 1984, Vol 45, Num 9, pp 982-984, issn 0003-6951Article

Reduction of interfacial tunnel defects in silicon due to chemical vapor deposition of tungstenDE BLASI, J. M; DELFINO, M; SADANA, D. K et al.Applied physics letters. 1987, Vol 51, Num 8, pp 602-604, issn 0003-6951Article

Role of interfacial oxygen on the quality and strain stability of pseudomorphic silicon-germanium layers grown on Si substratesBEDELL, S. W; ADAM, T. N; TURANSKY, A et al.Journal of crystal growth. 2011, Vol 316, Num 1, pp 101-105, issn 0022-0248, 5 p.Article

A study of atomic and molecular arsenic ion-implanted siliconDELFINO, M; SADANA, D. K; MORGAN, A. E et al.Journal of the Electrochemical Society. 1986, Vol 133, Num 9, pp 1900-1905, issn 0013-4651Article

Depth distributions and damage characteristics of protons implanted in n-type GaAsZAVADA, J. M; JENKINSON, H. A; WILSON, R. G et al.Journal of applied physics. 1985, Vol 57, Num 6, pp 2299-2301, issn 0021-8979Article

Low-Temperature Epitaxy of Compressively Strained Silicon Directly on Silicon SubstratesSHAHRJERDI, D; HEKMATSHOAR, B; BEDELL, S. W et al.Journal of electronic materials. 2012, Vol 41, Num 3, pp 494-497, issn 0361-5235, 4 p.Article

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